Water-Assisted Catalytic VACNT Growth Optimization for Speed and Height

The super-growth approach for carbon nanotubes synthesis is frequently used to boost the growth rate, catalyst lifespan, and height of vertically aligned nanotubes. elimination amorphous from particles, commonly made iron, by injecting water vapor into a chemical deposition process can enhance purity, alignment, prevent partial oxidation metallic catalyst. We present development modified growth-optimized water-assisted nanotube optimizing layer structure concentration 4” diameter Si wafers. A significant finding that under optimized conditions over 4 mm, highly uniform tall, structures be grown with minimum top crust about ~5–10 μm thickness. This was achieved film comprising >400 mm thermal SiO2 on wafer overcoated an e-beam batch run first deposited 20 nm layer, 10 Al2O3 1.1 Fe in 4-h step.